liquid mass flow controller
liquid mass flow controller

Liquid Mass Flow Controller

Laminar pressure differential mass flow controllers are favored in high-end industrial fields such as semiconductor manufacturing, biomedicine, and new energy because of their excellent response speed. The core mechanism of its fast response stems from the physical characteristics of pressure wave propagation, the high efficiency of signal processing, and the optimization of structural design.

  • Tubular flow splitting principle
  • The maximum full scale can reach 2kg/min
  • Short preheating time
  • Suitable for measuring small flow
  • Can communicate with the instrument through the host computer software, secondary instrument or PLC
  • Support customization
  • High precision
  • Corrosion resistance
  • OEM
  • Small zero drift
  • Not affected by ambient temperature and external pressure

Introduction of Liquid Mass Flow Controller

Liquid mass flow controllers calculate flow by measuring the differential pressure, pressure, and temperature of laminar flow elements. This product can be used to measure and control the mass flow of gas. It can also be used to measure and control the mass flow of liquids with a wide measurement range. It is used to accurately and reliably measure and control fluid mass flow. It is widely used in vacuum coating equipment, semiconductor process equipment, chemical and chemical experimental equipment, analytical instruments, metallurgical materials engineering, energy and power and other fields.

The gas mass flow controller can measure gas flow.

liquid mass flow controller

Technical Parameters of Liquid Mass Flow Controller

Range 0-2kg/min
Accuracy ±1.0%F.S
Range ratio MFC 50:1
Response time ≤1sec
Repeat accuracy ±0.2%F.S
Linear accuracy ±0.5%F.S
Power supply ±15vdc24vdc
Signal RS232+analog signal RS485+analog signal
Temperature coefficient <±0.1%F.S/℃
Ambient temperature 5…45℃
Stability ±0.1%F.S
Warm-up time 15min
Material SS316
Maximum pressure resistance 30bar(optional 60bar)
Connection method Card sleeve connection (optional VCR or other connection)
Sealing material Fluororubber Nitrile rubber (other optional)
Leakage rate <2×10⁻⁸atm.ml/s(He)
Protection level IP40

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Our liquid mass flow controllers control the flow of liquids. Sino-Inst makes every product custom made. Our professional technicians are always here to provide you with expertise. We ensure that you get the most suitable solution.

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Applications of Liquid Mass Flow Controller

  • Semiconductor manufacturing
  • Chemical vapor deposition (CVD)
  • Cleaning and etching
  • Reaction process control
  • Proportional feeding
  • Pharmaceutical industry
  • API delivery
  • Drug proportioning and mixing
  • Food processing
  • Liquid ingredient control
  • Beverage production
  • Environmental monitoring
  • Liquid sampling and analysis
  • Sewage treatment
  • Infusion control
  • Dialysis equipment
  • Culture medium preparation
  • Gas and liquid ratioliquid mass flow controller
More Detail

Working Principle of Liquid Mass Flow Controller

The principle of the laminar differential pressure mass flowmeter is based on Hagen-Poiseuille’s law.

It is mainly divided into two steps:

The first step is to establish a laminar state: The laminar flow element inside the flowmeter transforms the fluid in the turbulent state into a laminar state, so that the fluid presents laminar motion and provides stable conditions.

The second step is based on the linear correspondence between the pressure difference and the flow rate. According to Poiseuille’s law, the pressure difference (△p) in the laminar state is proportional to the volume flow rate (Q): Q=k·△p/μ (K is the structural constant of the laminar flow element, μ is the fluid viscosity, when the fluid viscosity is stable, the pressure difference directly reflects the mass flow rate)

The most typical laminar differential pressure mass flow meter contains five core components:

  1. Laminar flow element: transforms the passing fluid from a turbulent state to a laminar state
  2. Pressure difference sensor: monitor the pressure difference signal at both ends of the laminar flow element and transmit it .
  3. Pressure sensor: measures the pressure value of the measured fluid.
  4. Temperature sensor: measures the temperature value of the measured fluid
  5. Hardware circuit board: convert the pressure difference signal into a mass flow value and output a standard signal.

Workflow: Convert the fluid from a turbulent state to a laminar state. Then measure the pressure difference signal at both ends. The sensor collects the signal and calculates the mass flow rate through the ideal gas state equation.

Order Guide of Liquid Mass Flow Controller

 

Product type [C] Mass flow controller
Pressure resistance level [L] Low pressure resistance 30bar
Media type Selected by the manufacturer
Flow range Selected by the manufacturer
Power supply type [S] 24vdc [D] ±15vdc
Analog signal [V] 0…5vdc [A] 4…20mA
Digital signal: [X] Local display [R] RS232 [M] RS485 (Modbus-RTU)
Seal material [V] Fluororubber [T] EPDM [N] Chloroprene rubber 【B】Nitrile rubber 【Y】Others
Connector size 【A】φ3 【B】 φ6 【C】φ8 【D】1/8” 【E】1/4” 【F】3/8” 【Y】Others

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